| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a synthetic quartz glass material with stable quality by controlling burner deterioration, and the synthetic quartz glass material produced by using the method. SOLUTION: In manufacturing a synthetic quartz glass, a combustion gas comprising a silica compound, a combustible gas and a combustion supporting gas is injected from a quartz glass synthesis burner 12, combusted and reacted to accumulate a quartz glass on a rotating target to form an ingot. The quartz glass synthesis burner 12 is equipped with a circular tube 31 installed in center for injecting a raw gas, a plurality of ring type tubes 32... installed in concentric circles around the tube 31 and for injecting the combustible gas and the combustion supporting gas, and a plurality of circular fine tubes 28 for injecting the combustion supporting gas installed inside of the most outside circular tube 25. The gas flow rate in the circular fine tube 28 is controlled in such a way that the position of a flame during gas combustion in the manufacture takes off the top edge of the circular fine tube 28. |
