| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet type recording head which forms a pressure generation chamber with a high degree of accuracy and improves a discharging characteristics, its manufacturing method and an ink jet type recording device. SOLUTION: The ink jet type recording head is provided with a passage formation substrate 10 composed of a silicon single crystal substrate from which a pressure generating chamber 12 communicating with a nozzle aperture 21 is formed, and a piezoelectric element 300 composed of a lower electrode 60, a piezoelectricity layer 70 and an upper electrode 80 through a diaphragm at one direction side of the passage formation substrate 10. A nozzle plate 20 having the above nozzle aperture 21 is connected to the passage formation substrate 10 through a grounded layer 25 and at the same time, on the nozzle plate 20, a plurality of perforated holes 22 filled with the adhesive and continuing to the grounded layer 25 passing through the nozzle plate 20 to the thickness direction are set up.
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