| 摘要 |
PURPOSE: An apparatus for preventing malfunction of a wafer detecting unit of equipment for fabricating a semiconductor is provided to exhaust N2 gas pressure, by forming a purge output pin hole in a predetermined position of a fixing guide fixing a fiber sensor. CONSTITUTION: Deionized(DI) water or chemicals is introduced to eliminate particles. A wet station DI water bath exhausts waste water used in eliminating the particles. The fixing guides(12a,12b) fixes the fiber sensor, installed outside the wet station DI water bath. The fiber sensors are fixedly inserted into the fixing guides. The purge output pin holes(24a,24b) are formed in the predetermined positions of the fixing guides.
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