| 摘要 |
PROBLEM TO BE SOLVED: To provide a control valve having appropriate air tight structure when pressure of used liquid is low, and constructed to be assembled and manufactured at a low cost, using an ultrasonic motor. SOLUTION: A control valve main body is provided by air-tightly sealing a valve body with an elastic member, and the valve body with a valve seat having a valve port by O rings respectively, and fitting and fixing an upper lid to an upper side of the elastic member. The valve port connected to an outflow pipe is provided on the valve seat of the control valve main body, and an inlet pipe is provided on the valve seat or the valve body. A vibrator is structured by joining a piezoelectric element or an electrostriction element on an upper surface of the elastic member, and a driving element is provided on a lower surface of the elastic member. A rotor energized to a side of the driving element by a proper energizing means and a valve element rotating together with the rotor are provided in the control valve main body, and a flow rate to the outflow pipe is controlled by rotation of the rotor pressure- contacting to the driving element. |
