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发明名称
Method for producing silicon single crystal wafer and silicon single crystal wafer
摘要
申请公布号
EP0942078(B1)
申请公布日期
2002.08.14
申请号
EP19990104483
申请日期
1999.03.05
申请人
SHIN-ETSU HANDOTAI COMPANY LIMITED
发明人
TAMATSUKA, MASARO;IIDA, MAKOTO;KOBAYASHI, NORIHIRO
分类号
C30B15/00;C30B33/00;(IPC1-7):C30B15/00;C30B29/06
主分类号
C30B15/00
代理机构
代理人
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