发明名称 UV RADIATING DISCHARGE TUBE HAVING GAS SUPPLYING UNIT
摘要 PURPOSE: A UV radiating discharge tube having a gas supplying unit is provided to clean and change discharge gas inside the discharge tube. CONSTITUTION: A UV radiating discharge tube comprises a quartz tube, an inner electrode, an outer electrode, discharge gas and gas supplying units(200). When power is supplied to the inner electrode and the outer electrode, UV is radiated because of dielectric barrier discharge. The gas supplying units(200) eject deteriorated discharge gas from the inside of the quartz tube and inject refined discharge gas and cleaning gas into the quartz tube. The gas supplying units(200) include a pipe(90), a refiner(35) and a first pump(31). The refiner(35) refines the deteriorated discharge gas ejected from the quartz tube through the pipe(90). The first pump(31) transfers the deteriorated discharge gas from the quartz tube to the refiner(35) and the refined discharge gas from the refiner(35) to the quartz tube.
申请公布号 KR20020066144(A) 申请公布日期 2002.08.14
申请号 KR20010006434 申请日期 2001.02.09
申请人 APEX INC. 发明人 PARK, EUN SEOK;PARK, SANG JUN
分类号 H01J61/28;(IPC1-7):H01J61/28 主分类号 H01J61/28
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