发明名称 CERAMIC HEATER
摘要 <p>The objective of the present invention is to provide a heater wherein it is easy to forcibly cool the remaining heat of a heating element, wherein it is easy to control the resistance value of the heating element, wherein the temperature of the periphery does not become lower than a set value and wherein no cracks are generated by rapid temperature rising and rapid temperature falling. The present invention provides a ceramic heater comprising a ceramic substrate and a resistance heating element formed on the surface of the ceramic substrate, wherein the outermost circumference of a resistance heating element-formed area is located within 35 mm from the side face of the ceramic substrate. <IMAGE></p>
申请公布号 EP1231820(A1) 申请公布日期 2002.08.14
申请号 EP20010926084 申请日期 2001.05.01
申请人 IBIDEN CO., LTD. 发明人 ITO, YASUTAKA;HIRAMATSU, YASUJI
分类号 H01L21/00;H05B3/14;H05B3/26;(IPC1-7):H05B3/10;H05B3/20;H01L21/68;H01L21/027 主分类号 H01L21/00
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