NARROW BAND GAS DISCHARGE LASER WITH GAS ADDITIVE,申请号IL20000147514-传众专利搜索

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发明名称	NARROW BAND GAS DISCHARGE LASER WITH GAS ADDITIVE
摘要
申请公布号	IL147514(D0)	申请公布日期	2002.08.14
申请号	IL20000147514	申请日期	2000.06.29
申请人	CYMER, INC.	发明人
分类号	H01S3/104;G03F7/20;H01S3/02;H01S3/03;H01S3/034;H01S3/036;H01S3/08;H01S3/0971;H01S3/0977;H01S3/225;(IPC1-7):H01S	主分类号	H01S3/104
代理机构		代理人
主权项
地址

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