| 摘要 |
PROBLEM TO BE SOLVED: To provide a control valve using an ultrasonic motor capable of controlling flow rates to a plurality of flowing out pipes. SOLUTION: An airtight structure is composed of an elastic body, a valve body and a valve seat having a valve opening by welding each element to form a control valve main body. A valve opening connecting to at least two flowing out pipes is provided on a valve seat of the control valve main body and a flowing in pipe is provided on the valve seat or the valve body. A piezoelectronic element or an electrostrictive element is connected to an upper surface of the elastic body to construct a vibrator. This control valve utilizes the ultrasonic motor controlling flow rate by a rotor rotated by vibration of the vibrator and a means for appropriately energizing rotation of the rotor. A blocking part controlling opening of a valve opening connected to the flowing in pipe and the flowing out pipe is provided on a valve element rotating together with the rotor, and flow rate to the flowing out pipe is controlled by rotation of the rotor pressed and contacted on a driving element.
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