FLOW VELOCITY SENSOR ELEMENT, FLOW VELOCITY SENSOR, MANUFACTURING METHOD FOR THE FLOW VELOCITY SENSOR ELEMENT, MANUFACTURING METHOD FOR THE FLOW VELOCITY SENSOR, AND FLOW VELOCITY MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a flow velocity sensor element whose flow velocity measurement accuracy especially at a low flow velocity region has been improved, and to provide a flow velocity sensor utilizing the flow velocity sensor element. SOLUTION: The flow velocity sensor element 10 is provided with a capillary structure 1 that is as long as 20μm-500μm or 500μm-5 mm, support beams 2-1 to 2-4 that are provided on the base section of the capillary structure 1 and are formed to support the capillary structure 1, and strain gauges 3-1 to 3-4 that are provided at each of the support beams 2-1 to 2-4. The support beams 2-1 to 2-4 are supported by a substrate 4, and are integrated on the substrate 4. The capillary structure 1 is deformed when it comes into contact with fluid, and the deformation is detected by the strain gauges 3-1 to 3-4 via the support beams 2-1 to 2-4, thus indirectly measuring the flow velocity of the fluid from the detection value.