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发明名称
Low cost system for effecting high density interconnection between integrated circuit devices
摘要
申请公布号
EP0764967(B1)
申请公布日期
2002.08.14
申请号
EP19960306827
申请日期
1996.09.19
申请人
RAYTHEON COMPANY
发明人
HAYES, ROBERT STEPHEN
分类号
H01J19/24;H01J19/78;H01J1/304;H01J21/06;H01J21/10;H01J29/04;H01J29/96;H01J31/50;H01L27/04;(IPC1-7):H01J21/10
主分类号
H01J19/24
代理机构
代理人
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