发明名称 |
PROJECTING ELECTRODE, ITS FORMATION METHOD AND INSPECTION METHOD FOR ELECTRONIC COMPONENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a projecting electrode capable of securing sure electrical conduction between electrodes formed on a fine wiring board or a semiconductor device and to provide its formation method. SOLUTION: Projections 41 each having a sharp tip and a profile formed into a mountain-like shape are formed on an insulation material 40 of the wiring board by means of etching, a metal layer 42 comprising a first metal layer 1 and a second metal layer 2 is formed on the formed projections 41, and thus, bumps 7 comprising the projections 41 and the metal layer 42 are formed on this projecting electrode 51.
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申请公布号 |
JP2002228707(A) |
申请公布日期 |
2002.08.14 |
申请号 |
JP20010024903 |
申请日期 |
2001.01.31 |
申请人 |
FUJIKURA LTD;D D K LTD |
发明人 |
FUKUDA YASUO;NAKAO SATORU |
分类号 |
G01R31/26;G01R1/06;G01R1/067;H01L21/60;(IPC1-7):G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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