摘要 |
A CMOS integrated circuit to be used in a semiconductor test system for generating timing signals of high timing resolution and accuracy for testing semiconductor devices. The CMOS integrated circuit includes a heater circuit for generating heat based on electric current flowing there through, and a heater control circuit for detecting an amount of total electric current flowing through a timing generator block for generating timing signals, a control circuit block for providing timing data to the timing generator block, and the heater circuit and providing a control voltage to the heater circuit based on the amount of total current detected to control the current flowing through the heater circuit through a negative feedback loop.
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