摘要 |
The invention provides a subpixel accuracy registration technique where accuracy is not lost even where an image is subjected to deformation due to influences of the characteristics of the imaging device or noise. A fitting range setting device 105, sets a range of pixels of an input image with large differential values as a fitting range. A function fitting device 104, fits a mono-peak function for each fitting range, and obtains the edge position at subpixel accuracy. Registration is then effected with a pixel accuracy registration device 107. A corresponding candidate curve generating device 108, with respect to an edge point on a certain one image, makes a corresponding plurality of edge points on an other image corresponding candidate curves joined in a curve. A misregistration computing device 109, obtains the point where all of the corresponding candidate curves intersect or where most are concentrated, and considers the coordinate thereof to be displacement at subpixel accuracy from one image to the other image.
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