发明名称 REAL-TIME DETECTION APPARATUS FOR SENSING TRANSFERRING RATE OF ION BEAM
摘要 PURPOSE: A real-time detection apparatus for sensing a transferring rate of ion beam is provided to calculate and display the transferring rate of ion beam whenever ion beam is received. CONSTITUTION: An ion beam accelerator(11) is installed between a low energy Faraday cup(13) and a high energy Faraday cup(17). A low energy Faraday tube(31) is installed in front of the low energy Faraday cup(13). A disc(21) is installed at a rear side of the high energy Faraday cup(17). Each measurer(33,19,23) is installed in the high energy Faraday cup(17), the disc(21), and the low energy Faraday tube(31). The measurers(33,19,23) are used for measuring a dose of ion beam. The measurers(33,19,23) transmit measured values to a transferring rate calculator(35). The transferring rate calculator(35) receives signals from the measurers(33,19,23) and displays a transferring rate.
申请公布号 KR20020065276(A) 申请公布日期 2002.08.13
申请号 KR20010005711 申请日期 2001.02.06
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO, YEON HA
分类号 H01L21/265;(IPC1-7):H01L21/265 主分类号 H01L21/265
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