| 摘要 |
PURPOSE: A method of manufacturing a field emission display is provided to reduce an arcing source due to an electric field lump and improve reliability and life span of the FED by forming an emitter tip at an active region by a parting layer vertical deposition method and a metal lift-off method. CONSTITUTION: A cathode electrode(310), a resist layer(320), and an insulation layer(330) are formed subsequently on a glass substrate(300). A positive photoresist layer is formed on the insulation layer(330) with a predetermined thickness by using a laser interference lithography. A gate metal(350) is deposited on the photoresist layer and the insulation layer(330) by using an electron beam deposition technique. A gate hole is formed at front surface by lift-off the photoresist layer. After non active region is masked by a photosensitive resin, SiO2 cavity is formed by dry-etching inside portion of the active region in the insulation layer(330) by using the gate metal(350) as a hard mask. After the photosensitive resin is removed, aluminum as a first parting layer is deposited on the front surface in 15 angles. After the active region is masked by a photosensitive resin, aluminum as a second parting layer is deposited vertically. After the photosensitive resin is removed, Mo as an emitter material is deposited vertically to form an emitter tip inside of the active region. The first parting layer is lifted-off so that the emitter tip is formed only on the active region.
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