发明名称 ABRASIVE CLOTH
摘要 PROBLEM TO BE SOLVED: To provide an abrasive cloth capable of polishing a surface of a polishing object with high precision. SOLUTION: The abrasive cloth comprises extra fine fibers of fineness 0.3 dtex or less, and for the cloth, a chemical compound including at least one or more of hydrophilic groups, -OH, -COOH, -CONH-, and -SO3, is fixed, copolymerized, or graft polymerized. Hydrophilicity of the cloth is 60 or more.
申请公布号 JP2002224945(A) 申请公布日期 2002.08.13
申请号 JP20010023472 申请日期 2001.01.31
申请人 TORAY IND INC 发明人 MATSUNASE TAKEO;WATANABE KOJI;TAKASHINA KOJI
分类号 B24B37/20;B24B37/24;H01L21/304 主分类号 B24B37/20
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