| 摘要 |
A resonant element includes: a fixed substrate having a main surface in orthogonal X- and Z-directions; a planar vibrating body fixed via support beams so as to be vibratable in an X-direction, the planar vibrating body having a weight portion which is isolated from the fixed substrate; an exciter for vibrating the planar vibrating body in the X-direction, and means for adjusting the resonance frequency of said planar vibrating body by providing electrostatic forces to said planar vibrating body, and for correcting the tilt of said planar vibrating body with respect to the substrate plane direction of said fixed substrate, the tilt correcting means being provided at least opposing edge areas of said planar vibrating body with a gap therebetween in the X-direction, on the plane side and spaced from said planar vibrating body in a Y-direction orthogonal to the X- and Z-directions.
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