| 摘要 |
This invention discloses a multi-range fiber-optic reflective micrometer, which comprises a light source for emitting a beam to an object surface, a receiving fiber-optic array, a photo-detector array, and a processor. The processor output a measured value in accordance with a differential signal and a summation signal both derived from the two electric signals corresponding to two adjacent receiving optical fibers which output two sampled lights of stronger intensities as well as a scale voltage. Since the ratio of the differential and the summation signals is proportional to a section of a whole displacement of the object, the whole measuring range could be extended by increasing the number of the receiving optical fibers while its resolution is kept at a degree of deep-sub-micrometer. Moreover, since the measured value is based upon a ratio of the differential signal to the summation signal, its accuracy will not be influenced by the fluctuation in the intensity of the light source and in the reflecting surface.
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