发明名称 Near-field optical microscope
摘要 A near-field optical microscope comprising an optical probe which is arranged in opposition to a sample and irradiates the sample with an evanescent wave, a plurality of photodetectors which detect respective components of light scattered in different directions, among components of the scattered light generated by scattering of the evanescent wave by the sample, and a processor which analyzes characteristics of the sample on the basis of respective detection signals of the plurality of photodetectors.
申请公布号 US6433327(B1) 申请公布日期 2002.08.13
申请号 US19990323992 申请日期 1999.06.02
申请人 CANON KABUSHIKI KAISHA 发明人 HOSHI HIROAKI
分类号 G01N37/00;G01N21/47;G01Q60/18;G01Q60/22;G02B21/00;(IPC1-7):H01J3/14 主分类号 G01N37/00
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