| 摘要 |
Interconnections including copper conductor lines, vias and Damascene lines comprise an insulator or dielectric having openings therein, a first adhesion promoting conductive barrier liner material on the walls and base of the opening, a first conductive layer on the first adhesion material layer, the first conductive layer having a predetermined cross-sectional area and having electromigration resistance, a second adhesion promoting/conductive barrier layer on the first conductive layer and a soft low resistant metal such as copper filling the remainder of the opening forming the line or via. These interconnections have enhanced operating and electromigration life particularly if copper is missing or partially missing in the copper interconnections due to the copper deposition process.
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