发明名称 |
Heated and cooled vacuum chamber shield |
摘要 |
The invention is directed to an apparatus and method for reducing particulates in a semiconductor processing chamber. The apparatus comprises a shield for lining a portion of the interior of a vacuum processing chamber. The interior of the shield defines a shield passage. A heater element is disposed within the shield passage. A gas inlet is used for providing gases to the interior of the shield passage. The range of temperatures which may be used is wide and generally fitted to the process. For example, the invention may be used to provide a rapid cooldown or bakeout. Once the temperature is chosen, isothermal conditions can be maintained so as to minimize the thermal cycle stress, reducing cracking, peeling, etc.
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申请公布号 |
US6432203(B1) |
申请公布日期 |
2002.08.13 |
申请号 |
US19980328503 |
申请日期 |
1998.01.09 |
申请人 |
APPLIED KOMATSU TECHNOLOGY, INC. |
发明人 |
BLACK RUSSELL;TURNER NORMAN L.;DEMARAY ERNEST |
分类号 |
C23C14/00;C23C14/34;C23C14/56;H01L21/00;H01L21/203;(IPC1-7):B05C11/11;C23F1/02 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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