Wafer processing architecture including single-wafer load lock with cooling unit

摘要

A wafer processing system includes a single-wafer load lock with integrated cooling unit. The small volume of the single-wafer load lock allows for fast pump down and vent cycles. By integrating a cooling unit within the load lock, system throughput is further increased by eliminating the need to move a newly processed wafer to a separate cooling unit before moving the wafer to the load lock.