发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve production yield by preventing the wiring used for a peripheral circuit from peeling due to a liquid pressure at the time of a resist peeling processing by increasing the adhesion. SOLUTION: This semiconductor device is provided with a metal-base wiring (wiring 21 used for the peripheral circuit and bit wire 31) formed on a silicon oxide base insulation film (insulation film 12) formed by a film formation technique utilizing plasmas. The metal base wiring (wiring 21 used for the peripheral circuit) is provided with parts 23 where the wiring is thickened at prescribed intervals regardless of the positions of contacts.
申请公布号 JP2002222812(A) 申请公布日期 2002.08.09
申请号 JP20010019666 申请日期 2001.01.29
申请人 SONY CORP 发明人 IWABUCHI MAKOTO;ONO KEIICHI
分类号 H01L21/3205;H01L21/8242;H01L23/52;H01L27/108 主分类号 H01L21/3205
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