| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a surface acoustic wave element that can efficiently manufacture a surface acoustic wave element handling a high frequency and a high power, and to provide the surface acoustic wave element that can be easily and surely be manufactured by the manufacturing method. SOLUTION: A resist pattern R corresponding to an interdigital electrode 3 is formed on a piezoelectric substrate 2, a 1st electrode layer 31 made of Ti or an alloy whose major component is Ti is formed on the piezoelectric substrate 2 and the resist pattern R, furthermore (a) a 2nd electrode layer containing Cu or an Al group metallic material including 2 wt.% of Cu or more or (b) a 2nd electrode layer 32 of a structure consisting of layers including an electrode layer containing Cu or an Al group metallic material including 2 wt.% of Cu or more is formed on the 1st electrode layer 31, then unnecessary parts of the 1st electrode layer 31 and the 2nd electrode layer 32 are removed together with the resist pattern R by the lift-off process to simultaneously applying patterning to the 1st electrode layer 31 and the 2nd electrode layer 32. |
