摘要 |
PROBLEM TO BE SOLVED: To form a small and inexpensive high-frequency multichip module through a simple manufacturing process. SOLUTION: Functional chips 106a and 106b having one or more bare chip IC's 108 on ceramic substrates 107 are mounted on a modular board 101, obtained by bonding together a multilayer glass epoxy substrate 103 having a metal layer 104 as circuit wiring and through holes 110 and a metal plate 102 so that the bare chip ICs 108 facing the through holes 110. With this constitution, relatively inexpensive substrates such as the ceramic substrates 107 and the multilayer glass epoxy substrate 103 are used, and thus a high-frequency multichip module of high performance and excellent in workability in part replacement and the like is formed so that the module is small in size and inexpensive. |