发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that has a heavy bonding wire and a semiconductor chip not mechanically damaged, and has improved junction between the bonding wire and the semiconductor chip, and to provide a manufacturing method of the semiconductor device. SOLUTION: The thickness of an electrode film 7 of the semiconductor chip 100 is made 3.5-10 μm, thus preventing cracks in an interlayer insulating film 6 and an n semiconductor substrate 1 for ultrasonic bonding even if the diameter of the bonding wire (aluminum wire 12) is increased to 300 μm or larger.
申请公布号 JP2002222826(A) 申请公布日期 2002.08.09
申请号 JP20010020103 申请日期 2001.01.29
申请人 FUJI ELECTRIC CO LTD 发明人 IKEDA YOSHINARI;KIKUCHI MASAHIRO;YOSHIKOSHI KOJI
分类号 H01L21/60;H01L21/607 主分类号 H01L21/60
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