发明名称 |
OPTICAL SWITCHING DEVICE, METHOD OF MANUFACTURING FOR THE SAME AND IMAGE DISPLAY DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide an optical switching device of an light interference type which is easily manufactured and can be improved in optical performance. SOLUTION: A thin film-like translucent body 22 is formed on the side of a glass substrate 21 of the optical switching device 4 of the intermediate type for controlling a distance d between the translucent body 22 and a high reflector 42. An actuator 33 and a reflector 42 driven in a vertical direction by this actuator 33 are formed on another substrate 31. Since these substrates 21 and 31 can be separately manufactured, a yield can be improved. The optical switching device which facilitates working of a reflecting surface 41, is high in reflection efficiency and can display bright images is provided.
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申请公布号 |
JP2002221678(A) |
申请公布日期 |
2002.08.09 |
申请号 |
JP20010016899 |
申请日期 |
2001.01.25 |
申请人 |
SEIKO EPSON CORP |
发明人 |
YONEKUBO MASATOSHI;YAMAUCHI TAISUKE |
分类号 |
G02B26/08;G02B27/18;H04N5/74;(IPC1-7):G02B26/08 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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地址 |
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