发明名称 METHOD AND APPARATUS FOR FORMING DEPOSITION FILM, AND FOR MANUFACTURING ELECTROPHOTOGRAPHY PHOTORECEPTOR
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrophotography photoreceptor, having such as surface as is minimally scraped and is not irregularly scraped even under such a hard processing condition of electrophotography as to impose a large abrasive force on the photoreceptor, when used in an electrograph apparatus. SOLUTION: A method for manufacturing the electrophotography photoreceptor comprises, generating plasma between a substrate 112 in a reactive vessel 111 and the reactive vessel 111 of which the high frequency power is supplied, and sequentially layering a blocking underlayer, a photoconductive layer, and a non single-crystal hydrocarbon-film as a surface layer, in this order on the substrate 112. It also comprises cooling the lower part of the substrate 112, namely, a part of the base substance 112 close to an outlet 119, with a cooling member 121, when forming the surface layer. Thereby, a temperature of the part of the substrate 112 close to the outlet 119 does not rise, even when the energy for the plasma is increased to form the surface layer with high hardness.
申请公布号 JP2002220672(A) 申请公布日期 2002.08.09
申请号 JP20010015844 申请日期 2001.01.24
申请人 CANON INC 发明人 OKAMURA TATSUJI;HASHIZUME JUNICHIRO;UEDA SHIGENORI
分类号 G03G5/08;C23C16/26;C23C16/509;G03G5/082;(IPC1-7):C23C16/509 主分类号 G03G5/08
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