| 摘要 |
PROBLEM TO BE SOLVED: To provide an excellent pressure sensor of high measurement precision. SOLUTION: A pressure sensor (10) comprises an electrode (14) provided on a substrate (12), a dielectric film (15) provided to cover the electrode, and a conductive diaphragm (13) which, opposed to the electrode, is provided on the dielectric film with a gap (18) in between. A change in a contact area to the dielectrics film on the electrode when the diaphragm receives a pressure is detected, while an electrostatic capacity between the electrode and the diaphragm is measured, for measuring a pressure. The electrode is provided with a notch (19) which corresponds to an initial contact region of the diaphragm.
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