| 摘要 |
PROBLEM TO BE SOLVED: To provide quartz glass and a method of manufacturing it having excellent corrosion resistance to plasma, especially for F-base plasma gas, used for jig materials for plasma reaction in manufacture of semiconductor devices. SOLUTION: The quartz glass, which contains metal elements and is improved in plasma corrosion resistance, has no granular structure inside, the concentration of metal elements of 0.1-20 wt.%, a content of foams and foreign substances of <100 mm2 projected area per 100 cm3, and the inner visible light transmissivity of 50%/cm or more.
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