FLUORINE MOLECULAR LASER APPARATUS AND FLUORINE EXPOSURE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a fluorine molecular laser apparatus and a fluorine exposure apparatus that can estimate a spectrum characteristic with high accuracy by simple means and can control it within an allowable range. SOLUTION: The fluorine molecular laser apparatus produces main discharge 26 in a laser chamber 2 in which a laser gas containing fluorine is packed to generate fluorine molecular laser light 11. The gas pressure P of the laser gas in the laser chamber 2 is detected and a pressure range (Pm-PM) of the gas pressure P is set, in such a way that the spectrum characteristic is within the allowable range based on the relationship between the spectrum characteristic of the fluorine molecular laser light 11 and the gas pressure P. The gas pressure P is controlled within the pressure range (Pm-PM).