| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for obtaining an SEM image and SEM equipment used for this. SOLUTION: After internationally charging electric charge at early stages on a sample surface such as a photograph mask, the scanning electron microscope image, is set as the base which obtains the image based on a signal of a secondary electron produced by scanning with a primary electronic beam on the charged sample surface. The intentional electrification of the electric charge can carry out by the method of providing the sample surface with ion and charging the sample surface, using an ionized. The sample surface is once charged in fixed potential, and electric charges (ions or electrons) is distributed uniformly over the sample surface. Thereby, an initial focus of the primary electron beam can be well focused to a requested domain of in the sample surface, and pattern shift phenomenon generation can be reduced.</p> |
