| 摘要 |
PROBLEM TO BE SOLVED: To extract a mark as points from a binary image and to decide whether or not the pattern formed of the mark is a specific pattern. SOLUTION: An extraction part 20 has a master 11, a measurement part 22, and a 1st point imparting part 23, the measurement part 22 measures the number of the black pixels after in the mask or the number of black pixels after logical operation among the pixels, and the 1st point imparting part 23 converts the relation between the number of the black pixels of the mark and the number of black pixels of the background part of the mark, the deviation (continuity) of the number of black pixels when the mark is divided into areas, the relation (symmetry) between the number of the black pixels and the number of the black pixels of the mark after exclusive OR among the pixels constituting the mark, and the difference (rotation) between the number of the black pixels of an area rotated when the mark is divided into the areas and the number of the black pixels when the area is not rotated into points by using a two-dimensional table. A pattern detection part 32 converts the position shift quantity between the actual arrangement and ideal arrangement of the pattern composed of multiple marks into points and a determination part 34 decides whether or not the pattern is the specific pattern according to the points found by the 1st point imparting part 23 and the points of the position shift quantity found by the detection part 32.
|
