MANUFACTURING METHOD AND MANUFACTURING DEVICE FOR GASEOUS NITROGEN HAVING HIGH PRESSURE

摘要

PROBLEM TO BE SOLVED: To resolve the problem that gaseous nitrogen having a high pressure and high purity at the same time can hardly be produced. SOLUTION: In a manufacturing method for the gaseous nitrogen having a high pressure, the pressure of the gaseous nitrogen 103 is intensified by feeding first compressed air 101 to a pressure increasing valve 61 constituting a piston 63. In this case, the gaseous nitrogen 103 having a higher pressure than the first compressed air 101 is fed to the pressure increasing valve 61 and thereafter the first compressed air 101 is fed to the valve 61.