| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical unit which has advantage for miniaturization and cost reduction and in which an optical element and an actuator are integrated, and the optical element is properly displaced. SOLUTION: The optical element is composed of a first substrate 1 which is joined on the upper face of a second substrate 2. In the first substrate 1, four beam members 4 which have a crank-shaped beam part 4b are connected with a thin plate member 5 which is formed integrally with a mirror 7 and a beam member 3 which is located to enclose the thin plate member 5, and a first layer electrode is formed of the thin plate member 5 and the beam member 4. In the second substrate 2, on the other hand, a second layer electrode divided by four fixed electrode members 9 is placed opposite to the first layer electrode. Further, the thin plate member 5 is inclined or displaced in the vertical direction on an optical axis with an electrostatic force by controlling a voltage applied to the first and the second layer electrodes.
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