发明名称 INTERFERENCE MICROSCOPE AND METHOD OF OPERATION FOR THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an interference microscope which makes it possible to obtain a phase state of light to be subjected to interference in an object region and makes it possible to easily adjust (or control) the interference microscope at a low cost in accordance therewith and a method of operation for the same. SOLUTION: The interference microscope provided with at least one test article carrier unit disposed at a test article (sample), above all, a 4Pi- microscope, a Wellenfield microscope, I2M-microscope, I3M-microscope or I5M- microscope, is constituted in such a manner that at least one surface (29)-, more preferably (29)- of the test article carrier unit (22) is opto-microscopically detectable in order to determine an illumination state in the object region of the interference microscope.
申请公布号 JP2002221668(A) 申请公布日期 2002.08.09
申请号 JP20020000500 申请日期 2002.01.07
申请人 发明人
分类号 G02B21/34;G02B21/06;(IPC1-7):G02B21/34 主分类号 G02B21/34
代理机构 代理人
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