发明名称 ALIGNER AND EXPOSING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an aligner and an exposing method designed to alternately carry an exposure receiving member such as a printed board mounted on the exposure frames installed in upper and lower sides in/out an exposing section to inextricably provide a pattern exposure, enabling equal illumination of light volume without controlling of both-sided exposure light path length or light volume at an exposing section. SOLUTION: The aligner 1 alternately carries the exposure receiving members 7A/7B mounted on the upper/lower sided exposure frames 3A and 3B in/out the exposing section 8 to inextricably provide a pattern exposure. It exposes the exposure receiving member 7B on the lower side exposure frame 3B with the exposure frame 3B lifted up to the upper exposure frame 3A position at the termination via a passageway tilted when carrying the lower side exposure frame 3B into the exposing section 8.
申请公布号 JP2002221799(A) 申请公布日期 2002.08.09
申请号 JP20010016065 申请日期 2001.01.24
申请人 FUJI KOKEN KK 发明人 SARUWATARI KIYOSHI
分类号 G03F7/20;H01L21/027;H05K3/00;(IPC1-7):G03F7/20 主分类号 G03F7/20
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