| 摘要 |
PROBLEM TO BE SOLVED: To provide a correcting device which can correct the deviation of an optical axis with high responsiveness without deteriorating the transmittance from a light source (namely, while maintaining a desired throughput), an aligner which is improved in resolution by utilizing the correcting device, and to provide a method of manufacturing a device, and a device, such as a semiconductor, LCD, CCD, thin film magnetic head, etc., manufactured by utilizing the method. SOLUTION: The correcting device corrects the deviation between the optical axes of two optical units which are constituted so that light emitted from one optical unit may be made incident to the other optical unit and are separated from each other. The correcting device is provided with a converting section which converts the positional deviation between the optical axes into an angular deviation and an angle correcting section which corrects the angular deviation. |
