| 摘要 |
PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact having high thermal conductivity, high fracture toughness and high bending strength. SOLUTION: The aluminum nitride sintered compact has thermal conductivity measured by the laser flash method of >190 W/mK, fracture toughness by the IF method of >3.0 MPa.m1/2, and 3-point bending strength of >=450 MPa. Various conditions at steps from preparations of raw materials to firing are controlled to manufacture the sintered compact having the above physical properties in an industrial scale. |
