| 摘要 |
PROBLEM TO BE SOLVED: To provide a double-arm robot for transferring a substrate, which has a small size and excellent transfer efficiency. SOLUTION: This robot 10 comprises a support pedestal 11, two arm assemblies 12, 13 elastically connected to the support pedestal, and H-shaped forks 48, 52, each central part of which is connected to the top edge of each arm assembly. Each arm assembly consists of three arms 14, 15, 16; 14, 17, 18, which are connected turnable, wherein the arm 14 of the most basic edge side is commonly shared by both assemblies. In the contracted state of these arm assemblies, the arms overlap each other, and a small size is realized. |
