发明名称 Alpha particle shield for integrated circuit
摘要 An integrated circuit, comprising: a semiconductor substrate, a plurality of last metal conductors disposed above said substrate, a bottom metallic layer disposed on said last metal conductors, a top metallic layer, and an alpha absorber disposed between said bottom and top metallic layers, said alpha absorber consisting essentially of a high-purity metal which is an alpha-particle absorber. The metal is, for example, of Ta, W, Re, Os or Ir.
申请公布号 US2002105059(A1) 申请公布日期 2002.08.08
申请号 US20010777540 申请日期 2001.02.06
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 WACHNIK RICHARD A.;NYE HENRY A.;DAVIS CHARLES R.;ZABEL THEODORE H.;RESTLE PHILLIPS J.
分类号 H01L21/60;H01L21/768;H01L23/556;(IPC1-7):H01L21/44;H01L23/552;H01L23/48;H01L23/52;H01L29/40 主分类号 H01L21/60
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