发明名称 UMWANDLUNG VON FULLERENEN ZU DIAMANT
摘要 A method of forming synthetic hydrogen defect free diamond or diamond like films on a substrate. The method involves providing vapor containing fullerene molecules with or without an inert gas, providing a device to impart energy to the fullerene molecules, fragmenting at least in part some of the fullerene molecules in the vapor or energizing the molecules to incipient fragmentation, ionizing the fullerene molecules, impinging ionized fullerene molecules on the substrate to assist in causing fullerene fragmentation to obtain a thickness of diamond on the substrate.
申请公布号 DE69429322(T2) 申请公布日期 2002.08.08
申请号 DE1994629322T 申请日期 1994.03.11
申请人 GRUEN, DIETER M. 发明人 GRUEN, DIETER M.
分类号 C01B31/06;C23C14/06;C23C14/22;C23C16/27;C30B23/02;C30B25/10;C30B33/00;H01J9/02 主分类号 C01B31/06
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