CONFIGURABLE PATTERNING DEVICE AND A METHOD OF MAKING INTEGRATED CIRCUITS USING SUCH A DEVICE

摘要

A lithographic system for an integrated circuit fabrication process includes a computer (30, 32) and a configurable mask (20). The configurable mask is coupled to the computer. The configurable mask allows light to be transmitted in the pattern (150) controlled by a control signal from the computer. The mask can allow ASIC type functionality for designing custom design integrated circuits.