Method for fabricating transmission electron microscope

摘要

A fabrication method for a transmission electron microscope (TEM) slideis described. A die having device structures formed thereon is provided A thermal adhesive fills the surface of device structures formed on the die. The thermal adhesive is covered by a glass piece. A polishing step is performed to form a slide from the die. The glass piece is removed to expose the thermal adhesive. A sacrificial layer is then formed above the exposed thermal adhesive on the slide. A slicing step is performed to form a TEM slide.