| 摘要 |
A deep-ultraviolet violet laser beam which is a harmonic and is generated inside a nonlinear optical element (101) is emitted outside the nonlinear optical element (101), being spaced from a green laser beam, which is a fundamental wave. The green laser beam emitted outside the nonlinear optical element (101) is reflected by an input-coupling mirror (102) and applied again into the nonlinear optical element (101) in order to form a closed optical path for the fundamental wave. Also, the deep-ultraviolet laser beam emitted outside the nonlinear optical element (101) is reflected by a reflecting mirror (28) other than the input-coupling mirror (102) in order to emit the deep-ultraviolet laser beam from a deep-ultraviolet laser beam-generating section (20).
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