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发明名称
Verfahren zum Herstellen einer Halbleiteranordnung
摘要
申请公布号
DE69429636(T2)
申请公布日期
2002.08.08
申请号
DE19946029636T
申请日期
1994.02.21
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
ENDO, MASAYUKI;OHNISHI, TERUHITO;NOMURA, NOBORU
分类号
G03F7/38;H01L21/027;H01L21/266;H01L21/30;H01L21/311;(IPC1-7):G03F7/42
主分类号
G03F7/38
代理机构
代理人
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