发明名称 |
Method and apparatus for self-referenced wafer stage positional error mapping |
摘要 |
A wafer stage overlay error map is created using standard overlay targets and a special numerical algorithm. A reticle including a 2-dimensional array of standard overlay targets is exposed several times onto a photoresist coated silicon wafer using a photolithographic exposure tool. After exposure, the overlay targets are measured for placement error using a conventional overlay metrology tool. The resulting overlay error data is then supplied to a software program that generates a 2-dimensional wafer stage distortion and yaw overlay error map.
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申请公布号 |
US2002105649(A1) |
申请公布日期 |
2002.08.08 |
申请号 |
US20010891699 |
申请日期 |
2001.06.26 |
申请人 |
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发明人 |
SMITH ADLAI;MCARTHUR BRUCE;HUNTER ROBERT |
分类号 |
G03F7/20;(IPC1-7):G01B11/27 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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