发明名称 |
METHOD FOR STRUCTURING AN OXIDE LAYER APPLIED TO A SUBSTRATE MATERIAL |
摘要 |
The invention relates to a method for structuring an oxide layer applied to a substrate material. The aim of the invention is to provide an inexpensive method for structuring such an oxide layer. To this end, a squeegee paste that contains an oxide-etching component is printed on the oxide layer through a pattern stencil after silk screen printing and the printed squeegee paste is removed after a predetermined dwelling time. |
申请公布号 |
WO02061854(A2) |
申请公布日期 |
2002.08.08 |
申请号 |
WO2002EP01096 |
申请日期 |
2002.02.01 |
申请人 |
SIEMENS & SHELL SOLAR GMBH;MUENZER, ADOLF;SCHLOSSER, REINHOLD |
发明人 |
MUENZER, ADOLF;SCHLOSSER, REINHOLD |
分类号 |
H01L31/04;H01L21/311;H01L31/068;H01L31/18 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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