发明名称 METHOD FOR STRUCTURING AN OXIDE LAYER APPLIED TO A SUBSTRATE MATERIAL
摘要 The invention relates to a method for structuring an oxide layer applied to a substrate material. The aim of the invention is to provide an inexpensive method for structuring such an oxide layer. To this end, a squeegee paste that contains an oxide-etching component is printed on the oxide layer through a pattern stencil after silk screen printing and the printed squeegee paste is removed after a predetermined dwelling time.
申请公布号 WO02061854(A2) 申请公布日期 2002.08.08
申请号 WO2002EP01096 申请日期 2002.02.01
申请人 SIEMENS & SHELL SOLAR GMBH;MUENZER, ADOLF;SCHLOSSER, REINHOLD 发明人 MUENZER, ADOLF;SCHLOSSER, REINHOLD
分类号 H01L31/04;H01L21/311;H01L31/068;H01L31/18 主分类号 H01L31/04
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