(METH)ACRYLATE ESTERS, STARTING ALCOHOLS FOR THE PREPARATION THEREOF, PROCESSES FOR PREPARING BOTH, POLYMERS OF THE ESTERS, CHEMICALLY AMPLIFIABLE RESIST COMPOSITIONS, AND METHOD FOR FORMING PATTERNS

摘要

(Meth)acrylate esters represented by the general formula (1). These esters can be prepared by preparing a product of addition of a 1,3-diene with maleic anhydride by Diels-Alder reaction, reducing this product into a lactone, hydrating this lactone into an alcohol, and esterifying this alcohol with (meth)acrylic acid. The (co)polymers produced by (co)- polymerizing monomer compositions containing the (meth)- acrylate esters are excellent in transparency, dry-etching resistance, and solubility in organic solvents, and useful as resins for chemically amplifiable resist compositions. (1) (In the general formula (1), R<1>, R<2>, R<3>, and R<4> are each hydrogen, methyl, or ethyl; one of X<1> and X<2> is (meth)acryloyloxy and the other is hydrogen; and both A<1> and A<2> are hydrogen, or alternatively A<1> and A<2> are united to form -O-, -CH2-, or -CH2CH2-.)